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Showing 1 to 2 of 2 for “"Potassium hydroxide etching"”.
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Koh etching of silicon
In this research, a series of comparative etching experiments on silicon wafers have been carried out using potassium hydroxide (KOH) for different experimental etching conditions for concentration, temperature and time on (100) orientation p-type silicon wafers. Besides the basic etching …
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Fabrication of high-throughput critical-angle X-ray transmission gratings for wavelength-dispersive spectroscopy
… to fabricate the grating were done with wet potassium hydroxide (KOH) etching of silicon. This process successfully fabricated small areas of grating and enabled a successful demonstration of the soft x-ray diffraction efficiency. However, the open-area fraction was limited to below 20 …