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Showing 1 to 2 of 2 for “"Position metrology"”.
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Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
… novel method of alignment and three-dimensional position metrology that is compatible with many forms of proximity lithography. The method is called Interferometric-Spatial-Phase Imaging (ISPI), and is based on encoding three-dimensional position information in the spatial phase and frequency of …