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Showing 1 to 3 of 3 for “"Porous dielectrics"”.
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Resistive Switching in Porous Low-k Dielectrics
… devices. While increasing porosity of porous dielectrics lowers the dielectric constant (k), it also creates many reliability and implementation issues. One of the problems is the little understood metal ion diffusion and drift in porous media. Here, we present a rigorous simulation …
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Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching
(cont.) micromasking. Porous films seem especially prone, perhaps due to polymer diffusion into the pore structure. Control of polymerization during the etch through the use of lower-polymerizing fluorocarbons or the addition of oxygen was shown to effectively control excessive roughening on solid …
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Resistive Switching Behavior in Low-K Dielectric Compatible with CMOS Back End Process
… the issue is whether RS can be realized with porous dielectrics, and if so, what is the electrical characterization of porous low-k/Cu interconnect-RS devices with varying percentages of porosity, and the diffusive and drift transport mechanism of Cu across the porous dielectric under high …