Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"Plasmaenergetik"”.
-
Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
In the thesis, the relationship between the plasma chemistry and energetics, and the thin film composition and structure evolution of transition metal oxide thin films deposited by magnetron sputtering in an Ar/O2 atmosphere is investigated as a function of the O2 partial pressure (p(O2)). The …