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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 14 of 14 for “"Plasma-surface interactions"”.
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Scale-bridging molecular dynamics simulations of plasma-surface interactions
Plasma processing of materials plays a vital part in electronic, aerospace, automobile, metal manufacturing and biomedical industries. Plasma-surface interactions can be divided into two categories: controlled and erosive. Controlled plasma interactions are used to pattern the surfaces of materials …
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PLASMA-SURFACE INTERACTIONS DURING REACTIVE PLASMA PROCESSING OF HYDROCARBON FILMS
Reactive plasma interactions with hydrocarbon-based surfaces play a critical role in future biological-plasma applications and for microelectronic device manufacture. As device dimensions get smaller and we require fine control of surfaces during plasma processing we will need to develop more …
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Using Machine Learning to Generate a Surrogate Model for Plasma-Surface Interactions
Plasma-surface interactions are an important effect in laboratory plasmas, but too complicatedto be modelled directly in plasma simulations. However, plasma surface interactions can be modelled by Transport and Range of Ions in Matter (TRIM) simulations based on a binary collision approximation of …
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Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
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Study of plasma-surface kinetics and feature profile simulation of poly-silicon etching in Cl²/HBr plasma
This work characterized the Cl2/HBr ion enhanced plasma-surface interactions with poly-silicon as a function of the gas composition, ion energy, ion incident angle and other important process parameters. A realistic inductively coupled plasma beam apparatus capable of generating ions and neutrals …
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A technique for implementing complex boundary configurations in industrial plasma modelling and simulation
The use of plasma as an industrial tool has become the norm within the surface treatment industry. However, our understanding of the plasma surface interactions is still within the R&D phase. What can be done experimentally is limited due to the electromagnetic properties of plasma and the …
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An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
The Transformer Coupled Toroidal Plasma (TCTP) source uses a high power density plasma formed in a toroidal-shaped chamber by transformer coupling using a magnetic core. The objectives of the thesis are (1) to characterize the TCTP source, (2) to understand the kinetics and limitations of species …
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CHAOS: A multi-GPU PIC-DSMC solver for modeling gas and plasma flows
Numerical modeling of gas and plasma-surface interactions is critical to understanding the complex kinetic processes that dominate the extreme environments of planetary entry and in-space propulsion. However, simulations of these systems that evolve over multiple length- and time-scales is …
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Kinetics modeling and 3-dimensional simulation of surface roughness during plasma etching
The control of feature profiles in directional plasma etching processes is crucial as critical dimension, line-edge roughening, and other artifacts affect device performance and process yields. A profile simulator is necessary to predictively model the etching processes as well as roughness …
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Etching of Silicon, Silicon Nitride, and Atomic Layer Etching of Silicon Dioxide using Inductively Coupled Plasma Beams
… importance of this process, studies of the basic plasma chemistry and plasma-surface interactions when using these gases are largely lacking. Furthermore, fabrication of devices with feature sizes below 10 nm requires manufacturing with atomic level precision, making Atomic Layer Etching (ALE) …
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Dynamic interactions between energetic D and He ions on lithium-tungsten plasma-facing interfaces
… of highly-dense high-temperature fusion plasmas, a considerably higher demand is placed on the plasma facing components (PFCs) with an increase of fusion power production. Currently within operating experimental reactors, the PFCs need to handle only a few MW/m$^2$ of heat flux and …
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Coupling a Boltzmann plasma and BCA surface for the kinetic treatment of plasma-material interactions
DSpace SAF Submission Ingestion Package generated from Vireo submission #11546 on 2017-09-29 at 11:32:22
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Multiscale numerical simulations of the magnetized plasma sheath with massively parallel electrostatic particle-in-cell code
Understanding the physics of the plasma boundary and plasma-surface interactions is one of the key scientific challenges in fusion science and engineering. Large-scale integrated simulations and high-performance computing can provide valuable insights on the dynamic phenomena involved at the …
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Development of reduced-order models of the ion impact distribution function in magnetized plasma sheaths
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2023-09-01 without embargo terms