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Showing 1 to 1 of 1 for “"Plasma dissociation"”.
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N2, O2, and NF3 Dissociation in a Low Frequency, High Density Plasma Source
Radical densities and gas dissociation fractions were measured by optical emission spectroscopy (OES), combined with Ar actinometry for various mixes of N2, O2, and NF3 feed gases with Ar at 400 sccm total flow rate in a low frequency (400 kHz), high pressure (4.0 Torr), inductively-coupled …