Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 44 for “"Plasma diagnostics."”.
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Plasma diagnostics by the far infrared.
Massachusetts Institute of Technology. Dept. of Physics. Thesis. 1968. Ph.D.
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Development of PVD coating processes informed by plasma diagnostics.
… development of PVD technology and in particular plasma sources for vapour generation that can provide the necessary tools.This thesis describes plasma diagnostic studies of plasma discharges, developments of plasma sources and deposition of CrN coatings. Initially the project investigated vacuum …
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Plasma Diagnostics of Discharges in Nitrogen-Trifluoride (Etching, Semiconductor)
… of diagnostic techniques applicable to all plasmas used for semiconductor processing. By monitoring the change of the mass spectrum ion signals when the discharge was initiated, it was found that the discharge is much more effective at dissociating NF(,3) than CF(,4) and that the percentage …
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Dirac R-matrix scattering calculations in support of plasma diagnostics
… W II is needed to ensure reliable erosion diagnostics when investigating the influx of impurities into magnetically confined fusion plasmas. The atomic data for Ni II and Ge III provide more interest for astrophysical plasmas. In order to accurately represent the collisional processes for …
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… two magnetron cathodes to initiate a secondary plasma. The concept is to increase the ionization faction with the RF enhancement and utilize the ion energy instead of thermal energy to facilitate the ITO film growth. The closed-field unbalanced magnetrons create a plasma in the intervening …
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Batch-microfabricated miniaturized planar arrays of Langmuir probes for reentry plasma diagnostics and nanosatellites
… atmosphere, a high-density and low-temperature plasma sheath forms around it due to shock heating of the surrounding air and ablation of the heat shield material, which leads to the dissociation and ionization of the background atmosphere. The plasma sheath that surrounds the spacecraft affects …
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Ultra-thin boron nitride films by pulsed laser deposition: Plasma diagnostics, synthesis, and device transport
… The use of optical emission spectroscopy during plasma growth provides insight into chemistry, kinetic energies, time of flight data, and spatial distributions within a PVD plasma plume ablated from a boron nitride (BN) target by a KrF laser at different pressures of nitrogen gas. Time resolved …
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Investigation on plasma properties for deposition of titanium nitride film using reactive magnetron sputtering system
Deposition of thin film using plasma sputtering system had been widely discovered and developed extensively for many years in technological and industrial process especially formation of titanium nitride (TiN) films due to its high hardness, good wear resistance, low friction coeffcient and …
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Instruments design and testing for a Hall thruster plume experiment on the space shuttle
… onboard the Shuttle and will use plasma diagnostics mounted on the palette as well as on an articulated boom. Other objectives include contamination measurements, performance evaluation and optical diagnostics. This work presents first a review of recent papers on the instruments …
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Simultaneous multi-angle measurements of plasma turblence at HAARP
… the interaction region of overdense ionospheric plasma. Diagnostics included the Modular UHF Ionospheric Radar (MUIR) sited at HAARP, the Super DARN-Kodiak HF radar, and HF receivers to record stimulated electromagnetic emissions (SEE). Short pulse, low duty cycle experiments demonstrate control …
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Analysis of low-energy neutral hydrogen fluxes using an electron cyclotron resonance-heated discharge
… such as fundamental cross section measurement, plasma diagnostics, beam-plasma interactions, and further beam-target research.
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Propulsion mechanisms in a helicon plasma thruster
… a compact electric thruster utilizing a helicon plasma source is investigated with the goal of identifying potential thrust mechanisms. Performance characteristics such as thrust, specific impulse, ion cost and thrust efficiency are discussed and related to plasma parameters. The design and …
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An analysis of energy balance in a helicon plasma source for space propulsion
… to the analysis of power losses. A helicon plasma is a rather complex system with many potential loss mechanisms. Among the most dominant are optical radiation emission, wall losses due to poor magnetic confinement, and poor antenna-plasma coupling. This work sought to establish a …
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Studies of aspect angle dependence of plasma turbulence at HAARP
… the interaction region of overdense ionospheric plasma. Diagnostics included the Modular UHF Ionospheric Radar (MUIR) sited at HAARP, the Super DARN-Kodiak HF radar, and HF receivers to record stimulated electromagnetic emissions (SEE). Short pulse, low duty cycle experiments demonstrate control …
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Additively Manufactured, Multi-Langmuir Probe Plasma Sensing Device for Use on CubeSats
… probe (LP) sensor array for CubeSat ionospheric plasma diagnostics. The ionosphere is a critical layer of Earth's atmosphere consisting entirely of plasma, and reliable in-situ measurements made on satellites orbiting within the ionosphere are necessary for better understanding its properties. …
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Physical Conditions and Chemical Processes During Single-Bubble Sonoluminescence
… experimental evidence of the formation of a plasma. By using various techniques (e.g., small molecules and atoms as intra-cavity probes, standard methods of plasma diagnostics, and spectrometric methods of pyrometry), it was possible to quantify the heavy particle temperatures (15,000 K), …
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Development of high temperature/oxidation- resistant PVD coatings for cutting tools using HIPIMS
… for the CrAlYBCN/AlSiCN coating series. Plasma diagnostics optimised the process conditions for deposition; a highly ionised metal rich plasma was generated to investigate the effect of process conditions during the pretreatment step. It was found that metal ion implantation into the …
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Analysis of a Water Vapor Helicon Thruster Using Emission Spectroscopy
… to research the use of emission spectroscopy diagnostics. Helicon thrusters differ from conventional electric propulsion systems in that the conductive components that power the thruster do not contact the plasma propellant. Because of this design, propellants that would be corrosive in …
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Dusty plasmas with high electron depletion
Dusty plasmas with high electron depletion occur in a wide range of astrophysical and laboratory environments and constitute a strongly non-equilibrium plasma regime that is still not fully understood. In particular, the interaction of nanodust with the plasma, the resulting electron depletion, and …
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