Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 4 of 4 for “"Piezoresistive readout"”.
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High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators with Piezoresistive Readout
… research, thermally actuated resonators with piezoresistive readout have been developed. It has been shown that not only do such resonators require a simple fabrication process, but also their performance improves at higher frequencies by scaling down all the dimensions of the structure. In …
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A Microelectromechanical-Cantilever Hydrogen Sensor with Palladium-Driven Bending and Piezoresistive Readout
Hydrogen gas (H₂) is considered a promising source of environmentally friendly and sustainable energy of benefit for global decarbonization. However, given the flammable and explosive nature of H₂, highly sensitive and selective detection systems with fast response are needed to enable leakage …
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Electronic readout of microchannel resonators for precision mass sensing in solution by Rumi Chunara.
… microchannel resonators with electronic readout, eliminating the use of external optical components for resolving the sensor's resonant frequency. Piezo resistors have been fabricated on SMRs through ion implantation integrated with the existing SMR fabrication process. We fabricated two …
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MEMS Piezoresistive Micro-Cantilever Arrays for Sensing Applications
… simple system integration and high robustness of readout have been preferred, even at the price of a lower sensitivity with respect to other possibilities requiring more complex setups. In particular, piezoresistive readout has been considered as the best trade-off between sensitivity and system …