Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 2 of 2 for “"Piezoelektrischer Aktor"”.
-
Integration of ferroelectric thin films into silicon based microsystems
The integration of ferroelectric materials will enhance the functionality of conventional microsystems. The converse piezoelectric effect can be used for the fabrication of integrated actuators, which will help to realize integrated high frequency switches. The aim of this thesis is the integration …
-
Entwicklung von piezoelektrischen Stellantrieben mit CMOS-kompatibler Ansteuerspannung für mikrotechnische Anwendungen
Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can be build up monolithically as well as hybrid. These systems enable a high degree of functionality to be made with at the same time high level of integration density. While microsensors for such …