Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 5 of 5 for “"Piezoelectric thin films"”.
-
DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application
… systems (MEMS) often incorporate piezoelectric thin films to actuate and detect motion of mechanical structures. Aluminum nitride is advantageous for MEMS use because it can be deposited at low temperatures, is easily patterned using conventional photolithographic techniques, and …
-
Technological process for the fabrication of a MEMS microswitch actuated by a PZT thin film
… technologies. About MEMS microrelay, piezoelectric actuation offers the advantages of low power consumption, low actuation voltage, low actuation time and long life time. Actuators and microrelays based on piezoelectric thin films are usually made of silicon, exploiting SOI wafers. The …
-
Decoding of Facial Strains via Conformable Piezoelectric Interfaces and Three-Dimensional Digital Image Correlation
… consists of massmanufacturable, conformable piezoelectric thin films for strain mapping; multiphysics modelling for analysing the nonlinear mechanical interactions between the conformable device and the epidermis; and three-dimensional digital image correlation (3D-DIC) for reconstructing …
-
Optimization and design of radio frequency piezoelectric MEMS resonators
… resonators employing Lamb waves propagating in piezoelectric thin films have recently attracted much attention since they combine the advantages of the bulk acoustic wave (BAW) and surface acoustic wave (SAW) technologies: high phase velocity and multiple frequencies on a single chip. In …
-
Flexible electronics : materials and sensor fabrication
This dissertation demonstrates how to fabricate piezoelectric/pyroelectric thin films by using different printing techniques. These techniques could replace vacuum techniques for manufacturing piezoelectric/pyroelectric sensors. Ink-jet, screen and stencil printing techniques were developed to …