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Showing 1 to 1 of 1 for “"Photo-enhanced chemical vapor deposition"”.
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Low temperature carbon material deposition with photo-enhanced chemical vapor deposition
Photo-enhanced chemical vapor deposition (CVD) technique is investigated here for low temperature deposition of carbon nanotubes (CNTs) and hexagonal diamond. Most current deposition methods require high substrate temperature. Photo-enhanced CVD utilizes light energy to dissociate carbon containing …