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Showing 1 to 1 of 1 for “"Phosphorus doping"”.
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Effect of grain structure and doping on the mechanical properties of polysilicon thin films for MEMS
… investigated the role of grain size and doping on the nature and origin of critical flaws that determine the tensile strength and the local resistance to crack initiation in 1-μm thick polysilicon films, as quantified by the effective mode I critical stress intensity factor, KIC,eff. For …