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Showing 1 to 5 of 5 for “"Phase mask lithography"”.
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Ultra-lightweight nanorelief networks : photopatterned microframes
… techniques via holographic interference lithography and phase mask lithography were implemented for periodic and quasiperiodic bicontinuous polymer-air structures on the submicrometer length scale. For 3D quasiperiodically nanostructured materials, quasicrystalline phase mask lithography …
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Three-dimensional photonic crystal optoelectronics
… method. While fabrication techniques such as phase mask lithography may be used to create a large variety of 3D structures, they are typically formed in SU-8 photoresist which cannot survive high temperature processes such as chemical vapor deposition. In order to make these structures …
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Three-dimensional nanofabrication with elastomeric phase mask
… (PnP), uses conformable, elastomeric phase masks to pattern thick layers of transparent, photosensitive materials in a conformal contact mode geometry. Aspects of the optics, the materials, and the physical chemistry associated with this method are outlined in chapter 1. We also …
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Flexible Fabrication of Multi-scale Integrated 3D Periodic Nanostructures with Phase Mask
… diffracted-beam control during the fabrication. Phase masks, as one particular kind of DOE, are a promising direction for simple and rapid fabrication of 3D periodic nanostructures by means of Fresnel diffraction interference lithography. When incident with a coherent beam of light, a suitable …
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Design and fabrication of novel and functional 3D structures via proximity field nano-patterning
… (PnP) is a large-area interference lithography technique that is used to fabricate multi-dimensionally periodic micro-structures. Though a potent technique for 3D microfabrication that offers dual and superior advantage of scalable resolution and throughput, this technique has not …