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Showing 1 to 1 of 1 for “"Paschen's curve"”.
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Confinement of microplasma in silicon trenches with widths as small as 2.5 μm
… of 5 μm devices are consistent with Paschen’s curve. Operating devices with a characteristic dimension of 2.5 μm are also introduced in this thesis. Finally, a few potential strategies for creating “nanoplasma” devices are discussed.