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Showing 1 to 1 of 1 for “"Parylenes"”.
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Novel Low Dielectric Constant Thin Film Materials by Chemical Vapor Deposition
A modified CVD reactor was designed with a deposition chamber capable of accommodating 8" wafers, with the capacity to remotely pyrolyze two different precursors. The design was based on a previous working reactor, with the most notable improvements being a showerhead design for more even delivery …