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Showing 1 to 1 of 1 for “"Order reduction, MEMS"”.

  1. Model order reduction of electro-thermal MEMS

    Bechtold, Tamara

    … important in microsystems (in the following MEMS) development. In microelectronic systems, for example, high temperatures may cause the malfunction or even destruction of the device. Other devices, such as microsensors and microactuators need high temperatures to improve transduction …

    freiburg-diss Repository record