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Showing 1 to 1 of 1 for “"Nickel-Silizid"”.
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Strained and unstrained silicon nanowire array MOSFETs : fabrication and physical analysis
… strained and unstrained devices, respectively. Nickel-silicide contacts unite low extrinsic resistance and, in combination with dopant segregation, low Schottky barrier heights. For NWs, the silicidation speed decreases with increasing NW cross section, but no difference in silicidation speed of …