Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 2 of 2 for “"Neutral Flux"”.
-
Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources
… to investigate the development of energetic neutral species. The development, and expansion principle, of energetic ions in an EUV plasma is explained with a self-similar hydrodynamic developed by Murakami. This model explains that rapidly accelerated electrons, emitted from destabilized EUV …
-
Analysis of low-energy neutral hydrogen fluxes using an electron cyclotron resonance-heated discharge
… and proof-of-principle verification of a neutral hydrogen flux detection system, based on an ECRH discharge as the neutral flux ionizer. The significant features of the ionizer are its small size and simultaneous excitation of the ECRH mode using a 30 MHz RF driver and relatively small …