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Showing 1 to 1 of 1 for “"Nanostructured materials--Testing"”.
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Characterization of the mechanical properties of freestanding platinum thin films
… they form be characterized. Popular thin film materials used in MEMS devices are Aluminum (Al), Copper (Cu), Nickel (Ni) and Gold (Au). Platinum has traditionally gained acceptance into the MEMS industry because of its chemical inertness and high temperature stability. However the mechanical …