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Showing 1 to 1 of 1 for “"Nanometrolgy"”.
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Advancing AFM Nanometrology Through Experimental FSI Quantification, Novel Sensor Design, and Fractional ODE-based Material Models
Nanometrology, which is the study of materials at the nanoscale, has been an important topic for the material science community at large. Atomic Force Microscopy (AFM) has become an indispensable tool to perform nanometrology. Especially, contact resonance (CR) AFM has been used to perform accurate …