Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 679 for “"Nanometer"”.
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Atomic-Scale Characterization of Nanometer-Sized Graphene
… a method for depositing atomically clean, nanometer-sized graphene monolayers with 2-30 nm lateral dimensions and we probe the local electronic properties of the graphene using the ultrahigh-vacuum scanning tunneling microscope (UHV-STM). By using tunneling spectroscopy, we measure a …
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Dynamic nanometer alignment for nanofabrication and metrology
Future generations of IC fabrication depend in part on continued improvements in lithography. To meet the lithographic challenges posed by 25- nm lithography, a novel through-the-mask, interferometric imaging alignment method is described that has demonstrated detectivity below 1 nm. Approximately …
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Investigating transport through sub-nanometer zeolites pores
… simulations suggest that introducing rigid sub-nanometer pores into the active layer could substantially increase the water permeability and achieve perfect salt rejection. In this thesis, we synthesized MFI (Mobil Five) zeolites that have uniform, well-defined pores of ~~ 5.5 Å and …
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Nanometer-scale placement in electron-beam lithography
Electron-beam lithography is capable of high-resolution lithographic pattern generation (down to 10 nm or below). However, for conventional e-beam lithography, pattern-placement accuracy is inferior to resolution. Despite significant efforts to improve pattern placement, a limit is being …
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Local Viscosity and Environment on the Nanometer Scale
New optical setup for two photon excitation time-resolved fluorescence anisotropy and lifetime measurements was built and used to understand the local environment and viscosity. The rotational correlation time constants by the fluorescence anisotropy provide the information on the hydrodynamic …
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Nanometer-thick oxide films for pyroelectric energy conversion
… investigated pyroelectric energy conversion in nanometer-thick films. In addition, there is a lack of suitable techniques for characterization of pyroelectric and other related temperature-dependent properties of thin films. This work develops and implements techniques for temperature-dependent …
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Electrochemical Impedance Spectroscopy using adjustable nanometer-gap electrodes
… 0.25 nm resolution over a range of 50 gm. The nanometer smooth surfaces of the spherical electrodes also enable electrode gaps of less than 20 nm to be created.
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Measuring nanometer, three-dimensional motions with light microscopy
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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Probabilistic design for emerging memory and nanometer-scale logic
As semiconductor technology has scaled down, the impact of stochastic behavior in very large scale integrated circuits (VLSI) has become an ever-more important concern. This dissertation investigates two distinct classes of problems that require the use of probabilistic methods and models: (1) …
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Adressierung und Strukturierung von Biomolekülen auf der Nanometer-Skala
… Membranen, die eine gezielte Strukturierung im Nanometerbereich ermöglicht, vorgestellt. Vor dem Hintergrund, daß die Natur mit Polynucleinsäuren extrem vielseitige, universell einsetzbare und chemisch sowie molekularbiologisch sehr gut handhabbare molekulare Bausteine für den …
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Low Temperature Selective Silicon Epitaxy at the Nanometer Scale
A technique for providing low-temperature, nanometer scale, selective silicon epitaxy using the hydrogen-passivated silicon surface as a lithographic mask has been developed. The STM tip is used to define chemically reactive templates on the monohydride Si(100) surface at temperatures below the …
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Electron beam interactive oxide films for nanometer scale lithography
A number of oxide thin films produced by rf sputtering have been found to show high resolution lithographic characteristics when exposed under high dose rate conditions in a scanning transmission electron microscope. Holes and lines less than 10 nm in dimensions have been formed in amorphous films …
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Quantitative nanometer-scale thermal metrology using scanning joule expansion microscopy
Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by William Ingram (wingram2@illinois.edu) on 2011-05-25T14:41:49Z Item is restricted until 2013-05-25T14:41:28Z
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Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Current alignment technology is incapable of satisfying the needs of imminent generations of lithography. This dissertation delineates a novel method of alignment and three-dimensional position metrology that is compatible with many forms of proximity lithography. The method is called …
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Nanometer-precision electron-beam lithography with applications in integrated optics
Scanning electron-beam lithography (SEBL) provides sub-10-nm resolution and arbitrary-pattern generation; however, SEBL's pattern-placement accuracy remains inadequate for future integrated-circuits and integrated-optical devices. Environmental disturbances, system imperfections, charging, and a …
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Thermal conductivity of fluids containing suspension of nanometer-sized particles
… which are fluids containing suspension of nanometer-sized particles, have been reported to possess substantially higher thermal conductivity than their respective base fluids. This thesis reports on an experimental study of the effect of base fluid, particle size, particle volume …
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Nanometer scale observation of magnetization textures induced by ultrashort laser pulses
… ferrimagnetic alloy with picosecond temporal and nanometer spatial resolution, using a scanning x-ray transmission microscope that was recently equipped with an optical laser system. By the development of suitable measures in the sample design to mitigate the heat load on the magnetic film, …
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Nanometer-thick yttrium iron garnet film development and spintronics-related study
… demands YIG films that have a thickness in the nanometer (nm) range and at the same time exhibit low damping similar to single-crystal YIG bulk materials. This dissertation reports comprehensive experimental studies on nm-thick YIG films by magnetron sputtering techniques. Optimization of …
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