Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 69 for “"Nanolithography"”.
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An aligner for X-ray nanolithography
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
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Nanolithography and Nanofabrication Using Hydrogen Silsesquioxane Resists
Tremendous interest in nanotechnology has required versatile patterning tools for the fabrication of nanometer-scale structures with high precision and electron-beam lithography (EBL) has been widely used for this purpose. Hydrogen silsesquioxane (HSQ) has received much attention as a new class of …
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Scanning Probe Array Development for Dip Pen Nanolithography
Out of five array concepts attempted, three are practical and were demonstrated using lithography. Several packaging schemes were developed and used to install the arrays in AFMs modified for multi-probe applications. The arrays were used to write patterns of 1-octadecanethiol on gold surfaces with …
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Maskless nanolithography and imaging with diffractive optical arrays
Semiconductor lithography is at a crossroads. With mask set costs in excess of one million dollars, long mask turn-around times, and tools that are characterized by their inflexibility and skyrocketing costs, there is a need for a new paradigm in lithography. The work presented in this thesis, …
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Tip-based nanolithography and application to molybdenum disulfide devices
… scale structures and devices. Tip-based nanolithography (TBN) is a low-cost and versatile unconventional nanolithography technique that can be used to prototype novel devices. This dissertation reports the study of tip-based polymer nanostructure fabrication and the application of TBN to …
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Chemical Nanolithography and Single Molecule Optical Imaging With Metal -Coated Probes
… was prepared and used as a surface to support nanolithography by site-selective chemical catalysis. Palladium-coated atomic force microscopy tips (AFM), scanned over the organosiloxane surfaces at loads over approximately 2.5 micronewtons, induced reactions of the terminal organic functional …
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Silicon Nanoelectronic Devices Fabricated by Ultra-High Vacuum, Scanning Tunneling Microscope Nanolithography
… 12-200 nm wide and 750 nm long patterned by STM nanolithography are electrically connected to the outside world using ion implanted contacts. Nanowires ≥ 30 nm wide exhibit ohmic conduction. Magnetoconductance curves are analyzed in terms of weak localization theory. Nonlinear conduction …
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Assembly and functionalization of phage onto substrates patterned by dip-pen nanolithography
… devices. Substrates patterned with dip-pen nanolithography (DPN) serve as templates for the deposition of phage. On gold substrates, 16-mercaptohexadecanoic acid (MHA) is deposited to form patterned lines. After surface passivation and activation chemistry, phage are deposited and adhere to …
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Nanolithography and nanoscopy methods for the study of biological samples in confined spaces
… chips. The system was characterized and its nanolithography capabilities, using electron microscopy and atomic force microscopy, evaluated. The fabrication process is outlined and important details about the integration of nanofluidic functionalities into microfluidic masters elucidated. The …
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Design, fabrication and implementation of a flexure-based micropositioner for Dip Pen Nanolithography
Dip Pen Nanolithography (DPN) takes the concept of a quill-tip pen and shrinks it to the nanometer scale. DPN uses a machine to pick up and deposit proteins and liquids in arrays. A problem with the machine however is aligning the pen tip relative to the machine. Currently, it is aligned manually, …
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Fabricating protein arrays using Dip-pen Nanolithography techniques for improved sensitivity of biomarker detection
Dip-pen Nanolithography (DPN) was first established as a fabrication technique in 1999, as an alternative method for printing various small molecules and biomolecules on the low nanoscale. Thirteen years on, DPN plays a far more prominent role in nanotechnology investigations. Early studies …
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Insertion of metal oxides into block copolymer nanopatterns as robust etch masks for nanolithography
Directed self-assembly (DSA) of block copolymers (BCPs) is a prime candidate to further extend dimensional scaling of silicon integrated circuit features for the nanoelectronic industry. Top-down optical techniques employed for photoresist patterning are predicted to reach an endpoint due to …
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Development of a nanomanufacturing line to support dip-pen nanolithography on a massive scale
A manufacturing line to support dip pen nanolithography on a massive scale is justified and described. Appropriate machines are evaluated based on key parameters such as cost, rate, and resolution. Methods for comparing lines are discussed, and solutions for lowest cost and fastest lines are …
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Investigations of Structure / Property Interrelationships of Organic Thin Films Using Scanning Probe Microscopy and Nanolithography
… the thickness of DPP films and nanostructures. Nanolithography was accomplished using DPP films as either matrix self-assembled monolayers (SAMs) or as molecules for nanofabrication. Results presented in this dissertation demonstrate that DPP forms compact layers on Au(111), which can be used …
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A comparison of AB diblock and ABA triblock copolymers of polystyrene and polyferocenylsilane for nanolithography applications
… of interest in the pursuit novel methods of nanolithography. Their ability to self-assembly into periodic geometries with nanoscale feature sizes makes them attractive as etching masks and templating materials for microelectronics and nanodevices. BCP provide a scalable and low-cost method …
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Progress in the Synthesis and Modification of Glass Surfaces Necessary to the Study of Single Molecule Protein Folding and Nanolithography
… using a metal coated AFM tip, resulting in nanolithography of the surface which was observed using confocal microscopy.
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Design of a low-cost meso-scale, detachable fixturing system for probe-based nanomanufacturing equipment and instruments
… for the functionalization of DNA via dip pen nanolithography. A ball and groove kinematic coupling design was modified by the addition of flexural hinges to reduce the offset of friction on the coupling interface, thereby improving repeatability. A prototype fixturing assembly was fabricated …
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Laser assisted nano-optics processing in optical data storage
… films over a large area. Phase-change nanolithography is developed based on the microlens array patterning followed by wet chemical etching to fabricate 3D nanostructures. To further reduce the feature size, near-field scanning optical lithography is employed and the near-field …
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