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Showing 1 to 1 of 1 for “"Nanofabrication and microfabrication"”.

  1. Pathways for quantum dot optoelectronics fabrication using soft nanoimprint lithography

    Meneou, Kevin J.University of Illinois at Urbana-Champaign2010

    … mold, termed “soft NIL” is used to create and study quantum dot arrays according to two concepts. In the first concept, a dense array of nano-sized holes are etched into a blank GaAs substrate. When a thin InAs quantum dot (QD) layer is grown on top, the QDs nucleate only at the locations …

    uiuc Repository record