Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 7 of 7 for “"Nano-imprint lithography"”.
-
Hydrogen silsesquioxane (HSQ) for use in nano imprint lithography
… Current methods such as electron beam lithography (EBL), Extreme Ultra-Violet Lithography (EUV), and Nano-imprint lithography (NIL) are currently being studied to deliver a high throughput, low-cost process, and high field size for nano-lithography. EBL is a technique which can generate …
-
Membrane technology for the fabrication of three-dimensional photonic crystals
… photonic circuits on a single substrate. Nanofabrication techniques currently limit the ability to create the multilayer structure of dielectric materials. Past investigators have approached the problem using the layer-by-layer fabrication method; this method leverages the planar processes …
-
A study of mechanical forces induced by low-energy (10-100 eV) electron irradiation of alkanethiol self-assembled monolayers on Au(111)
… applications such as fabricating masks for nano-imprint lithography, manufacturing cross linked polymers and synthesizing novel chemicals. Low-energy secondary electrons scattered from the incident high-energy source in lithography and other techniques may introduce unwanted damage to the …
-
Fabrication and Characterization of Electrical Contacts for Charge Transport Study in Molecular Electronics.
Nanoscale imprint lithography (NIL) is investigated in the view point of the ability to form nanoscale feature. NIL at room temperature is proposed and demonstrated on thermoplastic substrate that has a restriction of heating. Anisotropic oxygen-based plasma etch performance is evaluated to remove …
-
Design, fabrication and characterization of resonant waveguide grating based optical biosensors
… detection limit down to single molecule. Optical nanostructures, specifically the resonant waveguide grating (RWG) and nano-ribbon cavity based biodetection are promising in this context. The main element of this dissertation is design, fabrication and characterization of RWG sensors for different …
-
Evanescent field enhanced fluorescence on a photonic crystal surface
… that include replica molding on plastic and nano-imprint lithography on quartz substrates result in devices that are practical for single-use disposable applications. In this dissertation I will address design, fabrication and characterization of PCs that employ the guided mode resonance …
-
Integration of resistive switching devices in crossbar structures
Conventional CMOS-technology defined by optical lithography will reach its physical limits within the next years together with technologies adopted for data storage. This work presents and combines the alternative concepts of resistively switching devices, usable as nonvolatile memory elements or …