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Showing 1 to 1 of 1 for “"NEMS (Nano Electromechanical Systems)"”.

  1. Thermally Actuated Resonant Silicon Crystal Nanobalances

    … a result, a wide variety of high frequency micro/nanoscale electromechanical resonators have recently been presented. MEMS resonators, as low-cost highly integrated and ultra-sensitive mass sensors, can potentially provide new opportunities and unprecedented capabilities in the area of mass …

    denver Repository record for Thermally Actuated Resonant Silicon Crystal Nanobalances (opens in a new tab)