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Showing 1 to 1 of 1 for “"Monolithic, rolled-up, MEMS, L-C network, Inductor, Capacitor"”.
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Chip scale monolithic integration of inductive and capacitive components by self-rolled-up membrane nanotechnology
… a three-dimensional (3D) microwave L-C filter network enabled by a CMOS-compatible two-dimensional (2D) fabrication approach, which combines inductive (L) and capacitive (C) self-rolled-up membrane (S-RuM) components monolithically into a single L-C network structure, thereby greatly reducing …