Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 3 of 3 for “"Molecular Layer Deposition"”.
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Interfacial Tailoring of Lithium-ion Batteries by Atomic/Molecular Layer Deposition
… and even safety problems. </p> <p>Atomic layer deposition (ALD) and molecular layer deposition (MLD) are two important techniques, both proceeding in self-limiting gas-solid reactions and exhibiting excellent capabilities for ultra-thin films, conformal coatings, and controllable growth. …
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Atomic/molecular layer deposition prepared size-selective catalysts and supported nickel catalysts
… In this dissertation, the application of atomic/molecular layer deposition (ALD/MLD) in heterogeneous catalyst synthesis and modification was examined.</p> <p>A novel nanostructured size-selective catalyst was synthesized by depositing ultra-thin porous shells on the surface of catalysts. The …
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Plasma-enhanced molecular layer deposition (PEMLD) of boron carbide dielectrics from carboranes for interconnect and patterning applications
… can act as diffusion barriers, copper capping layers, etch stops, hard masks, etc. Currently, silicon-based materials are being used to fulfill the majority of these needs, but complex next-generation multi-patterning schemes demand new materials and new methods to deposit them. In this work we …