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Showing 1 to 1 of 1 for “"Modulated Pulsed Power (MPP)"”.
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… directionality of ion flux. In this work, high power impulse magnetron sputtering (HiPIMS) and its derivative, modulated pulsed power (MPP) magnetron sputtering, with their claimed high ionization capability, are proposed for the application of barrier/seed layer deposition. Their plasma …