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Showing 1 to 1 of 1 for “"Mo/Si multilayers"”.
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Crack Patterns in Thin Films and X-ray Optics Thermal Deformations
Thin films and multilayers are widely used in many applications, ranging from X-ray optics to microelectronic devices. In service, the X-ray optics elements are exposed to the X-ray beam, which heats up the structure resulting in the thermal deformations, and consequently in distortions of the …