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Showing 1 to 1 of 1 for “"Mikroaktor"”.
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Entwicklung von piezoelektrischen Stellantrieben mit CMOS-kompatibler Ansteuerspannung für mikrotechnische Anwendungen
Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can be build up monolithically as well as hybrid. These systems enable a high degree of functionality to be made with at the same time high level of integration density. While microsensors for such …