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Showing 1 to 1 of 1 for “"Microspeaker"”.
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Deposition, Characterization, and Fabrication of a Zinc Oxide Piezoelectric Thin Film Microspeaker Using DC Reactive Sputtering
<p>A piezoelectric microspeaker device that could be used in a variety of acoustic applications was designed and fabricated using a thin film ZnO layer that was reactively DC sputtered onto a single crystalline n-type silicon substrate. When tested the microspeaker did not produce sound due to …