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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 104 for “"Micromachined"”.
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Micromachined microwave filters
Microwave circuits in the millimetre wave region demand low loss, and low dispersion transmission lines. The work carried out in this thesis is on low loss transmission lines and filters, based on a square coaxial transmission line which is made only of metal, avoiding dielectric and radiation …
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A micromachined SIS mixer
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
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Micromachined Components for RF Systems
Several fabrication techniques for surface micromachined 3-D structures have been developed for RF components. The fabrication techniques all have in common the use of epoxy patterning and subsequent metallization. Techniques and structures such as embedded conductors, epoxy-core conductors, a …
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Silicon micromachined wafer-bonded valves
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
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High-resolution micromachined interferometric accelerometer
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
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Micromachined transmission lines for microwave applications
… fabrication, characterization, and modeling of micromachined strip lines. The challenge of structuring this three-dimensional transmission line is solved by using the photosensitive resin SU-8 as the micromachinable material and as the dielectric in the strip line. Additionally, …
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Fluid effects in vibrating micromachined structure
This thesis presents the study of the fluid damping and surfboarding effects for the tuning fork gyroscope. The quality factors in the drive and sense axes will be evaluated and compared with the experimental results for a range of pressures. The effects of the holes and the proof mass thickness …
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Basic Study Of Micromachined Dep (dielectrophoretic) Manipulator
The capability of manipulating microparticle in small volumes is fundamental to many biological and medical applications, including separation and detection of cells. The development of microtools for effective sample handling and separation in such volumes is still a challenge. DEP …
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Development of a micromachined electrostatically suspended gyroscope
… explored in order to improve the performance of micromachined gyroscopes. Typically, a conventional micromachined gyroscope consists of a vibrating mass suspended on elastic beams that are anchored to a substrate. It measures the rotation rate of a body of interest by detecting rotation-induced …
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CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
This paper introduces silicon surface micromachined devices, and primarily focuses on the characterization of a silicon-surface gyroscope and a laterally isolated accelerometer. Unlike most micromachined gyroscopes that consist of a single resonator, this gyroscope takes advantage of two …
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Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
… of the devices. The nanopositioners were surface micromachined in a two-layer polysilicon process. Experiments were performed to characterize the resolution, repeatability, hysteresis, and drift of the second stages of the nanopositioners with open-loop control. Position measurements were obtained …
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Micromachined, Out-of-Plane Micro Flow Sensors
In addition, we use the fabrication platform to integrate 8 sensor array with on-chip signal conditioning using a commercial operational amplifier circuit. A new method to make the sensor array flexible is also proposed.
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A High-Q Micromachined Quatrefoil Suspension Gyroscope
… in the performances of Coriolis vibratory micromachined gyroscopes. Micro-electromechanical systems (MEMS) Coriolis vibratory gyroscopes (CVGs) are an increasingly popular choice for a wide range of applications thanks to their compact size, low power consumption, and low cost. However, …
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Micromachined infrared detector using wafer bonding technology
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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Interconnection, Interface And Instrumentation For Micromachined Chemical Sensors
… is required. For successful implementation of micromachined sensors in an instrument, reliable methods for interconnection and interface are in great demand between these two major parts. This thesis work investigates interconnection methods of micromachined chip devices, a hybrid fluidic …
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Modeling and Control of Surface Micromachined Thermal Actuators
… success implementing feedback control on surface micromachined MEMS devices. The inherent difficulties in sensing microscale phenomena complicate the development of an economical transducer that can accurately monitor the states of a surface micromachined system. We have demonstrated a simple and …
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The design and fabrication of movable micromachined mirrors
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1988.
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Micromachined Electrochemical Sensors For Hydrogen Peroxide And Chlorine Detection
Hydrogen peroxide and chlorine detection is critical for many biological and environmental applications. Hydrogen peroxide plays important roles in a variety of fields including plant physiology, medical, environmental and biochemical applications. Its role in plant defense and signal transduction, …
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Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
<p>The electrothermomechanical characteristics of an electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant …
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