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Showing 1 to 1 of 1 for “"Microelectromechanical systems--Materials--Testing."”.
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Design fabrication and calibration of MEMS actuators for in-situ materials testing
… Nickel (Ni) and Gold (Au) are popular thin film materials used in MEMS/NEMS. Various studies have been conducted in recent years to study the mechanical properties of freestanding thin films in situ in TEM to study their failure mechanisms. Some of these studies utilize MEMS devices as actuators. …