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Showing 1 to 1 of 1 for “"Microelectromechanical systems--Design and construction."”.
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Characterization of the mechanical properties of freestanding platinum thin films
… are used as Ohmic contacts. But the elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, dislocations and interstitials become quite …