Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 15 of 15 for “"Microelectromechanical system (MEMS)"”.
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Vehicle Axle Detection and Spacing Calibration Using MEMS Accelerometer
… and highway planning strategy. An advanced microelectromechanical system (MEMS) accelerometer for vehicle classification based on axle count and spacing was designed, tested, and applied to the pavement. Vehicle-pavement interaction was collected by the vibration sensor while vehicle axle …
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MEMS spatial light modulator for holographic displays
… spatial light modulator (SLM) built using microelectromechanical system (MEMS) technology. Several related MEMS SLMs are reviewed. In particular, the capabilities of Silicon Light Machines' Grating Light Valve (GLV T) and the Polychromator by Honeywell, Sandia, and MIT are examined because …
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Mems approaches in infrared imaging
The design and performance simulation of a novel Microelectromechanical System (MEMS) based infrared detector, that utilizes coefficient of thermal expansion, is discussed. The detector design uses a variety of thermal expansion coefficient materials, including alloys which are connected to ambient …
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Design of test bench apparatus for piezoelectric energy harvesters
… bench for the characterization of piezoelectric microelectromechanical system (MEMS) energy harvester being developed by the Micro & Nano Systems Laboratory research group at MIT. Piezoelectric MEMS energy harvesters are micro-devices that are able to harvest energy from their ambient vibrations …
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MEMS IMU navigation with model based dead-reckoning and one-way-travel-time acoustic range measurements for autonomous underwater vehicles
… sensor suite, relying mostly on a consumer grade microelectromechanical system (MEMS) inertial measurement unit (IMU) and a vehicle’s dynamic model velocity. An implementation of an Extended Kalman Filter (EKF) that includes IMU bias estimation and coupled with a range filter, is obtained in the …
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ALN/ALSCN Acoustic Resonant Systems Based on Ultra-Thin Piezoelectric Films
… nitride (AlN/AlScN) based acoustic resonant systems. Various microelectromechanical system (MEMS) acoustic resonators — surface acoustic wave (SAW), thin-film bulk acoustic resonator (FBAR), and Lamb wave resonators— were investigated by employing the ultra-thin piezoelectric films targeted …
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MEMS IMU inertial measurement unit one-way-travel-time inertial measurement unit autonomous underwater vehicles
… sensor suite, relying mostly on a consumer grade microelectromechanical system (MEMS) inertial measurement unit (IMU) and a vehicle's dynamic model velocity. An implementation of an Extended Kalman Filter (EKF) that includes IMU bias estimation and coupled with a range filter, is obtained in the …
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The Deformable Mirror Demonstration Mission (DeMi) On-Orbit Analysis
… mission to demonstrate the use of a 140 actuator microelectromechanical system (MEMS) deformable mirror (DM) and a closed-loop adaptive optics (AO) system in space. DeMi launched to the International Space Station (ISS) on the NG-13 Cygnus resupply mission on February 15, 2020 and was deployed …
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Micro-opto-mechanical switching and tuning for integrated optical systems
… costs and enhance the functionality of optical systems in a manner similar to what has been achieved by integrating electronic circuits. One of the basic optical elements required to enable integrated optical circuits is an integrated optical switch, analogous to transistor switches used in …
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Super-high-frequency lithium niobate microelectromechanical system resonators
… on the demonstration of a new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which …
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Wall shear measurements in arterial flows
… the hemodynamical characteristics within the system, which has significant effect upon shear stress (SS) and wall shear stress (WSS) levels, as well as particle residence times. The relationship between these hemodynamic parameters and vascular injury response is of great relevance to …
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Advancing acoustic filters for 5G front-ends: Lithium niobate piezoelectric MEMS resonators and filters
… for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, fabrication, and demonstration of …
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Optimization and design of radio frequency piezoelectric MEMS resonators
Radio frequency (RF) microelectromechanical system (MEMS) resonators employing Lamb waves propagating in piezoelectric thin films have recently attracted much attention since they combine the advantages of the bulk acoustic wave (BAW) and surface acoustic wave (SAW) technologies: high phase …
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Domain-Specific Analog Physical Computing Accelerators
… varies in time. The physical processes which the system samples are: 1) Microelectromechanical system (MEMS) sensor noise. 2) Electron tunneling noise. This dissertation shows that the mean and standard deviation of both the MEMS- and electron tunneling noise-based programmable random variate …
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Self-rolled-up microtube technology for cellular outgrowth guidance and monitoring
… conductance, photonics, and strain-based sensor systems. These microtube-forming membranes are easily fabricated and can be integrated into a microfluidic channel (or become the channel itself) which can be easily integrated into an intravenous or catheter tube for diagnostics. In this …