Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 193 for “"Microelectromechanical Systems"”.
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Contact-printed microelectromechanical systems
Microelectromechanical systems (MEMS) are ubiquitous. Scalable large-area arrays of MEMS on a variety of substrates, including flexible substrates, have many potential applications. Novel methods for additive fabrication of thin (125±15 nm thick) suspended gold membranes on a variety of rigid and …
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Commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are …
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Simulation tools for microelectromechanical systems
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic …
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Ortho-Planar Mechanisms for Microelectromechanical Systems
A method for representing the design space of ortho-planar mechanisms has been developed. The method is based on the Theorem of Equality of Orientation Set Measures (TEOSM) which allows mechanisms to be represented by points in an abstract space. The method is first developed for single loop planar …
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
… microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the …
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The commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally …
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Collocation Based Meshless Methods for Microelectromechanical Systems
After the theoretical study of the meshless methods, the FCM and boundary cloud method (BCM) were applied to solve the fluid flow in the MEMS devices. Combining the fluid flow module with the solver for the Poisson and Nernst-Planck (PNP) equations, a tool for the simulation of ion transport in the …
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Microelectromechanical Systems (Mems) for Radio Frequency Applications
The work in this thesis focuses on the development of two of the most fundamental on-chip RF passive devices (tunable capacitors and inductors) using micromachining technology. First, a new wide-tuning-range tunable capacitor design is proposed and prototype devices are fabricated using surface …
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Hydraulic amplification for actuation in microelectromechanical systems
… amplification is explored for applications in MicroElectroMechanical Systems (MEMS). Building on the batch fabrication technologies of the semiconductor industry, MEMS technology could enable the simultaneous fabrication of multiple microhydraulic systems of which hydraulic amplifiers would …
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Analysis of DRIE uniformity for microelectromechanical systems
A quantitative model capturing pattern density effects in Deep Reactive Ion Etch (DRIE), which are important in MEMS, is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-to-die interactions resulting from pattern density and reactant species …
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Modeling and characterization of microelectromechanical systems condenser microphone
MEMS Condenser microphones are becoming a promising technology to substitute the current standard microphones as they have several benefits such as batch fabrication, integration feasibility, low noise level, stable frequency response and high sensitivity; so their demand is increasing and is …
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Fault detection and diagnosis : application in microelectromechanical systems
… methodology for capturing failure modes of two microelectromechanical systems; an electrostatic parallel-plate microactuator and a torsionally resonant atomic force microscope. From an engineering point of view, failure modes appeared in the microcomponents of the microactuator and the TR-AFM …
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Stochastic modeling and uncertainty quantification in microelectromechanical systems
… step in the design of most modern engineering systems due to the need to create robust devices that can tolerate variations in the manufacturing process or in the operating environment. These variations or uncertainties can be represented by stochastic variables which perturb the deterministic …
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Non-reciprocity in piezoelectric and electrostatic microelectromechanical systems
Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2025-05-01
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ALUMINUM SCANDIUM NITRIDE (AlScN) FILMS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
… for applications in Micro- electromechanical systems (MEMs) especially in Fifth Generation (5G) cellular technology. Various internal stress arise during the process for developing AlScN films. Abnormal Ori- ented Grains (AOGs) are undesired grains that grow in the off c-axis in AlScN films …
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Simulation-Based Design Under Uncertainty for Compliant Microelectromechanical Systems
… and product development in the field of microelectromechanical systems (MEMS) has led to a greater emphasis on simulation-based design for increasing first-pass design success and reliability. The use of compliant or flexible mechanisms can help eliminate friction, wear, and backlash, but …
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Design, Fabrication, and Analysis of Polymer-Based Microelectromechanical Systems
In this work I report research to develop new design methods, materials, processing and fabrication techniques, devices, experimental results, and system development to realize polymer-based MEMS. Polymer multimodal tactile sensing skins modeled on the human sensory skin, polymer cilia based …
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Theoretical and Experimental Investigation of Adhesion in Microelectromechanical Systems
Based on the Extended-Maugis-Dugdale (EMD) elastic theory, an improved single asperity meniscus model considering asperity deformation due to both contact and adhesive forces was developed. Specifically included in this model was the solid surface interaction inside the contact area. It was found …
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Efficient Mixed -Domain Analysis of Electrostatic Microelectromechanical Systems (Mems)
… point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method (FCM) based …
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Diagnosis of operational changes in microelectromechanical systems via fault detection
As microelectromechanical systems (MEMS) devices migrate into progressively more critical systems, the reliability these devices have to demonstrate must increasingly improve. Current research in the reliability of MEMS has succeeded in increasing the reliability of commercialized MEMS before they …
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