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Showing 1 to 1 of 1 for “"Microactuators--Calibration"”.
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Design fabrication and calibration of MEMS actuators for in-situ materials testing
Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, …