Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 130 for “"MicroElectroMechanical Systems (MEMS)"”.
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Commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are …
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
… microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the …
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The commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally …
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Microelectromechanical Systems (Mems) for Radio Frequency Applications
The work in this thesis focuses on the development of two of the most fundamental on-chip RF passive devices (tunable capacitors and inductors) using micromachining technology. First, a new wide-tuning-range tunable capacitor design is proposed and prototype devices are fabricated using surface …
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ALUMINUM SCANDIUM NITRIDE (AlScN) FILMS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
… for applications in Micro- electromechanical systems (MEMs) especially in Fifth Generation (5G) cellular technology. Various internal stress arise during the process for developing AlScN films. Abnormal Ori- ented Grains (AOGs) are undesired grains that grow in the off c-axis in AlScN films …
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Efficient Mixed -Domain Analysis of Electrostatic Microelectromechanical Systems (Mems)
Computational analysis of electrostatic MEMS requires a self-consistent solution of the coupled interior mechanical domain and the exterior electrostatic domain. Conventional methods for coupled domain analysis, such as finite element/boundary element methods (FEM/BEM), require mesh generation, …
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Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
This thesis describes electrostatic actuation techniques and mechanical design features for realizing large planar analog vertical travel in an electrostatically actuated diffractive mid-infrared optical device, which is robust, both to manufacture, and against pull-in during use. This device, …
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Code Division Multiplexing of Fiber Optic and Microelectromechanical Systems (MEMS) Sensors
… to the high-speed mixed-signal communications systems that are now commonplace. The evolution started with multiplexing identical information sources, such as plain old telephone service (POTS) devices. Recently, however, methods to combine signals from different information sources, such as …
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On the feasibility of integrated optical waveguide-based in situ monitoring of microelectromechanical systems (MEMS)
… optical waveguides to measure the motion of microelectromechanical structures (MEMS). MEMS are a class of silicon devices which are being developed as sensors and actuators. Because these free moving structures are fabricated using processes similar to microfabrication, MEMS devices and …
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Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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On-Orbit Characterization of a Microelectromechanical Systems (MEMS) Deformable Mirror (DM): Mission Results from the Deformable Mirror Demonstration Mission (DeMi) CubeSat
… and demonstrated the successful operation of a Microelectromechanical Systems (MEMS) Deformable Mirror (DM) on orbit for the first time. As part of space-borne adaptive optics systems, DMs correct optical aberrations and speckles due to mechanical, thermal, and optical effects. MEMS DMs are …
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Measurement and model of a radio frequency microelectromechanical switch
A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF …
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Assessing the viability of various metallic microfabrication techniques
… techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, …
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Calibration of a microvision system for MEMS device characterization
With the growing use of microelectromechanical systems (MEMS), it becomes increasingly important that reliable, accurate methods for characterizing and calibrating MEMS be developed. One microsystem in need of specific characterization measurements is the polychromator, an electrically …
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Simulation-Based Design Under Uncertainty for Compliant Microelectromechanical Systems
… and product development in the field of microelectromechanical systems (MEMS) has led to a greater emphasis on simulation-based design for increasing first-pass design success and reliability. The use of compliant or flexible mechanisms can help eliminate friction, wear, and backlash, but …
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Electronics development for the Deformable Mirror Demonstration Mission (DeMi)
… voltage drive electronics for a multi-actuator microelectromechanical systems (MEMS) based deformable mirror (DM) for the 6U CubeSat Deformable Mirror Demonstration Mission (DeMi) with the objective of increasing the NASA Technology Readiness Level (TRL) of the MEMS DM toward its use for direct …
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Embedded avionics with Kalman state estimation for a novel micro-scale unmanned aerial vehicle
… that can be readily applied to small embedded systems and still provide reasonably accurate results. Methods to calibrate and compensate systemic inaccuracies in microelectromechanical systems (MEMS) sensors, commonly used in micro-scale UAV applications, are also developed. The problems …
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Diagnosis of operational changes in microelectromechanical systems via fault detection
As microelectromechanical systems (MEMS) devices migrate into progressively more critical systems, the reliability these devices have to demonstrate must increasingly improve. Current research in the reliability of MEMS has succeeded in increasing the reliability of commercialized MEMS before they …
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Characterization and modeling of polysilicon MEMS chemical-mechanical polishing
… (CMP) is becoming an enabling technology for microelectromechanical systems (MEMS). To reliably use CMP in the manufacturing process, designers must be able to accurately predict the CMP process and control final surface uniformity. This thesis extends integrated circuit CMP knowledge towards …
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Application of an electrospray thruster in a nanosatellite
Use of microelectromechanical systems (MEMS) could lead to the mass production of small (<10kg) satellites that are highly reliable and low-cost. To satisfy the satellites propulsive requirements a thruster will need to have a high specific impulse yet still be small enough to not contribute …
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