Global ETD Search
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Showing 1 to 2 of 2 for “"Micro-machined devices"”.
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Assembling 3D MEMS structures by folding, aligning and latching 2D patterned films
The techniques used in the fabrication of micro-electro-mechanical systems (MEMS) were adopted from the integrated circuits (IC) industry and are mostly limited to patterning thin films on a flat substrate. As a consequence, micro-machined devices mostly comprise sets of flat two-dimensional (2D) …
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Nanoscale Thermoelectrics: A Study of the Absolute Seebeck Coefficient of Thin Films
… are constantly being sought out. Thermoelectric devices have the ability to generate clean, renewable, energy out of waste heat. However promising that is, their inefficiency severely inhibits applicability and practical use. The usefulness of a thermoelectric material increases with the …