Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 26 for “"Micro-electromechanical Systems (MEMS)"”.
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Stochastic Modeling of Micro-Electromechanical Systems (Mems)
… framework is demonstrated by simulating several MEMS devices, such as MEMS switches, resonators, comb-drives etc.
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Strategic outsourcing of micro-electromechanical systems (MEMS)
ABB Automation is starting to experiment with Micro-electrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakthrough products and services that will revolutionize the market in ABB's …
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A remotely automated microscope for characterizing micro electromechanical systems (MEMS)
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
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Laser direct-write fabrication of MEMS
Micro-electromechanical systems (MEMS) have many applications in healthcare, consumer electronics, and automobile industry. Unfortunately, the development of novel MEMS is significantly hindered by the limitations of the state-of-the-art MEMS microfabrication processes such as high cost of …
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The applications for 3d inverse opal microstructures
Three-dimensional micro structures have been great interest to many scientists due to their useful properties. In this thesis, I show some examples of these 3-D micro structures applications, and in particular 3-D inverse opal micro structures made using spherical colloidal nanoparticles as …
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Modeling and algorithms for optimizing beam steering optical crossconnects
One of the most significant applications of Micro-Electromechanical Systems (MEMS) technology in optical communications today is in building large non-blocking optical crossconnects based on arrays of tiltable micro-mirrors. The complexity for these crossconnects to make all possible connections …
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Integrated optical switching using titanium nitride micro electromechanical systems
… in optical integrated circuits (OICs) based on micro electromechanical systems (MEMS). The device consists of a ring resonator add-drop filter and a conductive MEMS bridge which is actuated by electrostatic force. Introducing conductive material into the electromagnetic evanescent field of the …
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Computational electromagnetics for microstrip and MEMS structures
… will be introduced for the analysis of general microstrip structures. It is based on a newly developed matrix-friendly dyadic Green's function for layered media (DGLM), which is represented in terms of only two Sommerfeld integrals and is suitable for developing fast algorithms. The path …
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ALUMINUM SCANDIUM NITRIDE (AlScN) FILMS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
… films and resonator devices for applications in Micro- electromechanical systems (MEMs) especially in Fifth Generation (5G) cellular technology. Various internal stress arise during the process for developing AlScN films. Abnormal Ori- ented Grains (AOGs) are undesired grains that grow in the off …
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System analysis and design of a low-cost micromechanical seeker system
Precision guided targeting systems have been in use by the U.S. military for the last half-century. The desire for high targeting accuracies while maintaining minimal collateral damage has driven the implementation of guidance systems on a myriad of different platforms. Current seeker systems using …
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Fabrication and assembly of micron-scale ceramic components
The micron-scale manufacturing industry has grown to hundreds of billions of dollars since the advent of the transistor in 1947. Increasing demands for integration of surface mount components, greater use of portable electronic devices, and miniaturized medical diagnostic devices have given rise to …
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A study on computational electromagnetics problems with applications to casimir force calculations
… force of recent interest due to up and coming micro-electromechanical systems (MEMS) devices. The Casimir force becomes relevant in the behavior of MEMS devices and efficient calculation of the forces would be desirable to aid in their design. Recent methods have been developed that incorporate …
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Printed electronics and micro-electromechanical systems
Current electronics and micro-electromechanical systems (MEMS) manufacture is optimized for the production of very high-volume parts on a limited range of substrates. These processes are long, consume large amounts of resources, and require expensive machines and facilities, but yield excellent …
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Simulation and testing of wavefront reconstruction algorithms for the deformable mirror (DeMi) cubesat
… complex to implement. New technologies such as Micro-electromechanical Systems (MEMS) DMs can potentially alleviate these problems. MEMS DMs also have applications in high-energy lasers, optical communications, and imaging systems. However, MEMS DMs have not been sufficiently tested in an …
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Towards Active Monitoring of The Micro Transfer Printing Process
Current microelectronics and micro-electromechanical systems (MEMS) fabrication techniques are optimized for the production of very large volume of parts on a limited range of substrates. These processes have been designed to produce excellent results but still consume large amounts of time and …
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Micro-scale scratching by soft pad asperities in chemical-mechanical polishing
… the manufacture of integrated circuits (IC) and micro-electromechanical systems (MEMS), chemical-mechanical polishing (CMP) is widely used for providing local and global planarization. In the CMP process, polishing pads, typically made of polyurethanes, play a key role. Due to the random, rough …
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Characterizing Plastic Deformation Mechanisms in Metal Thin Films using In Situ Transmission Electron Microscopy Nanomechanics
… behavior of small-scale materials used to create micron-sized features for devices such as flexible or stretchable electronics or micro electromechanical systems (MEMS). Nanocrystalline (NC) and ultrafine-grained (UFG) metal thin films show increased strength when compared to their coarse-grained …
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Towards an integrated atom chip
… This thesis presents a new approach in which microscopic pyramidal MOTs’ are integrated into the chip itself. This greatly reduces the number of optical components and helps to simplify the process significantly.<br/>Also presented is a method for creating a planar-concave micro-cavity capable …
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Fully electronic method of measuring post-release gap and gradient/residual stress of a MEMS cantilever
… more power compared to other components. Micro-electromechanical systems (MEMS) have a huge potential to reduce these problems while simultaneously offering superior performance compared to current leading-edge technology. However, MEMS technology has difficulty transitioning from the lab …
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