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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 79 for “"Micro-Electro-Mechanical Systems"”.
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Theory for hydrostatic gas journal bearings for micro-electro-mechanical systems
The goal of the MIT micro-engine project is to develop high-speed rotating Power MEMS (Micro-Electro-Mechanical Systems) using computer chip fabrication technologies. To produce high power (10-50 W) in a small volume (less than one cubic centimeter), the micro-turbo-machinery must be spun at a …
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Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems
… Institute of Technology, Dept. of Mechanical Engineering, 1995.
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Implementation of a Low Cost Micro Electro Mechanical Systems Inertial Navigation Solution
<p>The purpose of this study is to develop a low cost navigation solution for General Aviation (GA) aircraft and flight testing aircraft. This low cost solution uses a Global Positioning System (GPS) coupled with an Inertial Navigation Solution (INS) to provide a more accurate, stable navigation …
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Mode I and Mode II Measurements For Stiction Failed Micro-Electro-Mechanical Systems
Among MicroElectroMechanical Systems (MEMS), the most common type of failure is stiction. Stiction is the unintended adhesion between two surfaces when they are in close proximity to each other. Various studies have been conducted in recent years to study stiction. Our research group has shown the …
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FastStokes : a fast 3-D fluid simulation program for micro-electro-mechanical systems
… drag forces on geometrically complicated MEMS (micro- electro- mechanical systems) devices. Unlike the 3-D finite element or finite difference solvers which often take days to run to completion or fail when geometry gets complicated, the FastStokes 3.0 simulation program is capable of simulating …
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Design, Fabrication, and Characterization of a Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm for Use in Micro-Electro-Mechanical Systems
<p>Previous work done at Cal Poly has shown that thin-film nickel-titanium (NiTi) can be easily sputtered onto silicon wafers and annealed to create a crystallized shape memory alloy (SMA) film. Initial work on creating devices yielded cantilevers that were highly warped due to thin-film stress …
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Evaluation on the thin-film phase change material-based technologies
… materials are considered, non-volatile electronic memories and MEMS (Micro-Electro-Mechanical Systems) actuators. The markets for those two applications are fast growing and rapidly changing, so new materials technologies with superior performance are of great interest. Devices made with …
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Predicting the Effects of Dimensional and Material Property Variations in Micro Compliant Mechanisms
<p>Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. To obtain accurate and reliable predictions of mechanism behavior, the effects of these variations need to …
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Study of the electromechanic aspects of RF MEM devices with particular emphasis on the dynamic behavior for the case of RF MEM switches and tuneable capacitors
Research on MEMS (Micro Electro Mechanical systems) has seen an amazing growth during the last 15 years, stimulated both by their interesting physical properties and their attractive application potential. One of those appealing MEMS applications are Radio Frequency (RF) switches. These devices …
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Emergency delivery of Vasopressin from an implantable MEMS rapid drug delivery device
… implantable rapid drug delivery device based on micro-electro-mechanical systems (MEMS) technology was designed, fabricated and validated for the in vivo rapid delivery of vasopressin in a rabbit model. In vitro characterization of device performance found the device capable of reliably and …
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Sensor Package Analysis and Simulation for Direct Sensor-to-Satellite Links
… the design and the performance of low-power microsensors that communicate directly to a satellite or a constellation of satellites. Information is spread using pseudo noise (PN) or Barker codes. The sensors use a single circular microstrip patch element with a wide beamwidth or a miniature …
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Cross-Linked PDMS Expansion Due to Submersion in Liquid and Supercritical CO2
<p>Characterization of micro/nano-copper particles impregnated Polydimethylsiloxane (PDMS) submersed in supercritical carbon dioxide (scCO2) was studied. The purpose of this investigation was to advance micro-corrosion sensor technology utilizing PDMS and micro-metal particle composite as the …
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A thermally efficient micro-reactor for thermophotovoltaic power generation
… fuels exhibit very high energy densities, and micro-generators converting the stored chemical energy into electrical power are interesting alternatives to batteries in certain applications. The increasing demands in power and total energy delivered to portable consumer electronics such as …
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Towards and industrial ecosystem for power MEMS
… with the commercial applications of MEMS (Micro-Electro-Mechanical Systems) manufacturing processes to advanced energy technologies. This field of engineering has come to be known as Power MEMS. Four such technologies are singled-out for detailed consideration, based on the efforts that …
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Towards personal fabrications : tabletop tools for micron and sub-micron scale functional rapid prototyping
Three tools for the rapid prototyping of micron and sub-micron scale devices are presented. These tools represent methods for the manufacture of PEMS, or Printed micro Electro Mechanical Systems, and are enabled because they exploit the novel properties of nanocrystalline materials and their …
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In vivo activation and biocompatibility of a MEMS microreservoir drug delivery device
… for initial animal studies. The improved MEMS (micro-electro-mechanical systems) device was used for the subcutaneous delivery of both tracer molecules (fluorescein and mannitol) and a chemotherapeutic agent (carmustine) in rats. Both temporal and spatial profiles of the tracer molecules were …
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Capacitive displacement sensing for the Nanogate
The Nanogate is a micro electro mechanical systems (MEMS) device that uses a cantilever structure to control the separation between two extremely flat surfaces. It has been proposed that the Nanogate be used as part of a nanoscale instrument for studying the behavior of fluids at the molecular …
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The Relevance of Potential Indicators of External Load for Movement Evaluation in Elite Football Training
… load monitoring strategy. Global Positioning Systems (GPS) incorporated into Micro-Electro-Mechanical Systems (MEMS) devices appear to be the technology that has been most widely adopted to determine activity (Akenhead & Nassis, 2016). The commonly used GPS technologies are regularly …
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Design and fabrication of a microneedle for the implantation of floating microstimulators
… components associated with the nervous system. Microelectrodes have been used in stimulating and detecting electrical activity in neurons. When stimulating or recording neural tissue activity using microelectrodes, there are usually many problems and difficulties in obtaining the correct …
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