Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 10 of 10 for “"Micro-Electro Mechanical System (MEMS)"”.
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Monolithic In-Plane Tunable Optical Filter
This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is …
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A MEMS thermoelectric generator
… of fuel processing and miniaturization remain. Microfabrication has the potential to address this miniaturization. Here I present work towards a thermoelectric generator based on micro-electro-mechanical system (MEMS) fabrication technologies. This thesis includes an examination of the current …
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Novel Design Solutions for High Reliability RF MEMS Switches
… and characterization of Radio-Frequency (RF) Micro-Electro-Mechanical System (MEMS) switches for space applications. The work was inspired and supported by the European Space Agency (ESA) Contract No. ITT AO/1-5288/06/NL/GLC ?High Reliability Redundancy Switch?. The main purpose of the project …
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Design, Fabrication, Testing of CNT Based ISFET and Characterization of Nano/Bio Materials Using AFM
… the next generation ion concentration sensing system. Micro Electro-Mechanical System (MEMS) fabrication techniques, such as photolithography, diffusion, evaporation, lift-off, packaging, etc., are required in the fabrication of the CNT-ISFET structure on p-type silicon wafers. In addition, …
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Non-silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application
A systematic investigation has been performed for "Electric Nose", a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) …
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Active Nonlinear Vibration Control of Engineering Structures of Multiple Dimensions
An active nonlinear mechanical vibration control strategy is developed in the research of the author’s PhD program for the nonlinear vibration control of engineering structures of multiple dimensions. The proposed control strategy has been applied in several wildly applied typical engineering …
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High resolution measurement of telecommunication component polarization mode dispersion by means of quantum interferometry
… optimal performance in fiber-optic communication systems. Telecommunication service providers need their system vendors to match the performance of their platforms to the overall system PMD accumulation, including both fiber and component PMD. The fiber PMD is a characteristic of the optical fiber …
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Modelling and Design Optimisations of CMOS MEMS Single Membrane Thermopile Detector Arrays
… Metal-Oxide-Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) technology are widely used across consumer and industrial applications. The combination of CMOS and MEMS technologies allows for the production of devices with high performance, good reliability and consistent …
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A Novel Unit Cell Antenna for Highly Integrated Phased Arrays in the SHF Band
<p>Phased arrays are electromagnetic antenna systems comprised of many radiating elements and processing electronics. Radiating elements are typically positioned in an orderly grid within the antenna aperture. In the receive mode of operation, radiating elements capture some of the signal energy …
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Effect of noise on the pull-in dynamics of an electrostatic microswitch
… effects of noise on the pull-in dynamics of a micro-electromechanical switch. We take into account thermal noise and noise present in the voltage source. Thermal noise is modeled as white noise. First, we study its effect on the linear response of the system. Then, we study the uncertainty in …