Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 8 of 8 for “"Micro actuator"”.
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Study of Size Reduction, Reliability and Lead Safety of an Intra-Cochlear Lead-Zirconate-Titanate Micro-Actuator
… intra-cochlear lead-zirconate-titanate (PZT) micro-actuator to generate acoustic wave directly in the inner ear. Current design of the intra-cochlear micro-actuator is a square PZT diaphragm anchored at all four edges forming a tiny speaker. The purpose of this dissertation is to address three …
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Design of a high-speed-force-stroke thermomechanical micro-actuator via geometric contouring and mechanical frequency multiplication
… are observed when one contours the geometry of micro-thermomechanical actuators (pTMAs), (2) how to parametrically model and optimize these improvements, (3) how to use transient electrical command signals to augment these improvements, and (4) how to design arrayed pairs of actuator teams that …
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Electrostatic micro actuators for mirror and other applications
Micro-electro-mechanical systems (MEMS) based electrostatic micro actuators are becoming important building blocks for innovations in optical signal processing and computing systems due to their inherently small size, high density, high speed and low power consumption. Generally, the principle of …
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MICROSCOPIC SURFACE ELECTROCHEMICAL ACTUATORS FOR VOLTAGE-TUNABLE OPTICAL ELEMENTS
… present a novel application of a voltage-driven micro actuator technology, the surface electrochemical actuator (SEA), to work as the moving top membrane of an optical resonator. These actuators are fabricated massively in parallel, in a two layers of lithography fabrication procedure utilizing …
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Modeling the Thermal Performance of an Intelligent MEMS Pressure Sensor with Self-Calibration Capabilities
… its functionality and accuracy. By integrating a micro-actuator with a pressure sensor, the sensor can self-calibrate, eliminating the complexities and costs associated with traditional sensor calibration methods. The present work is focused on furthering understanding and improving the thermal …
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Design and Fabrication of an Electric-Field Induction Motor
This thesis explores a meso-scale micro-actuator of rotational motion based on electric induction. This electric induction motor (EIM) has a cylindrical geometry with a radial air gap between the stator and the rotor. A significant novelty is that the motor does not contain metal, but is rather …
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Modeling, design, and fabrication of pulsed fluidic micro-actuators
… design, and fabrication of electrostatic micro fluidic actuators, which use the pulsing mechanism described above to generate a fluid flow. Particle Image Velocimetry (PIV) is used to visualize the jet at various drive frequencies. The complex coupling between the electric field driving …