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Showing 1 to 1 of 1 for “"Micro Electro Mechanical Systems (MEMS)-scale nanopositioner"”.
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A 2 degree-of-freedom SOI-MEMS translation stage with closed loop positioning
… and characterization of a closed loop XY micro positioning stage. The XY micro positioning stage is developed by adapting parallel-kinematic mechanisms, which have been widely used for macro and meso scale positioning systems, to silicon-based micropositioner. Two orthogonal electrostatic …