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Showing 1 to 1 of 1 for “"Micro/nano structure"”.
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Scaleable nanomanufacturing of metasurfaces using microsphere photolithography
… issue that limits their implementations. Microsphere photolithography (MPL) uses a scalable self-assembled microsphere array as an optical element to focus collimated light to nanoscale photonic jets in a photoresist layer. This dissertation investigates the fabrication capabilities, …