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Showing 1 to 1 of 1 for “"Metamaterial (MEMS)"”.
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Aluminum nitride microelectromechanical infrared detectors with integrated metamaterial absorbers
… detectors based on the seamless integration of metamaterial (MM) structures with microelectromechanical (MEMS) AlN resonators. Historically, uncooled absorbers have been limited in two key metrics: selectivity, the ability to distinguish distinct wavelengths of incident light, and sensitivity, …