Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 2 of 2 for “"Metallic films--Mechanical properties--Testing"”.
-
Design fabrication and calibration of MEMS actuators for in-situ materials testing
Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, …
-
Characterization of the mechanical properties of freestanding platinum thin films
Many MEMS devices utilize nanocrystalline thin metallic films as mechanical structures, in particular, micro switching devices where these films are used as Ohmic contacts. But the elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the …