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Showing 1 to 1 of 1 for “"Metal Surface Wave Plasma"”.
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Depositing highly crystalline thin film silicon for photovoltaic solar cells utilizing metal surface wave plasmas
This thesis aims to explore the ability of the Metal Surface Wave Plasma (MSWP) to create low damage, high speed deposited silicon thin films for solar photovoltaics. Studies characterizing thin films have been performed in the past, but very few utilizing the MSWP. Due to the high electron …