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Showing 1 to 3 of 3 for “"Megasonic"”.
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CONTROL OF CAVITATION USING DISSOLVED CARBON DIOXIDE FOR DAMAGE-FREE MEGASONIC CLEANING OF WAFERS
… of the finding in the development of improved megasonic cleaning formulations. Megasonic cleaning, or the removal of contaminants particles from wafer surfaces using sound-irradiated cleaning fluids, has been traditionally used in the semiconductor industry for cleaning of wafers. Recently …
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Numerical modelling of electrodeposition process for printed circuit boards manufacturing
… in the required flow behaviour at the micro-via. Megasonic agitation can also be used to enhance electrolyte convection in the plating cell. This is achieved by placing megasonic transducers into the plating cell. This leads to several phenomena, one of which is known as the acoustic streaming. …
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Design and fabrication of electromagnetic micro-relays using the UV-LIGA technique
… in SU-8 lithography. To overcome this obstacle, megasonic agitation was applied to the developer bath, which resulted in faster development rates, more uniform development, and the ability to produce structures with higher aspect ratios. To date, this process has been used to achieve 100:1 aspect …