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Showing 1 to 1 of 1 for “"Mask protection"”.
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Characterization of Amorphous Carbon Films for Mask Protection during Ion Beam Bombardment
… simplest terms the use of a beam, incident on a mask, to transfer the mask pattern onto the substrate. This process is utilized by every semiconductor company to create the microchips, which make modern life possible. Though photons are the industry standard, atom/ion beam lithography is a …